Monday - August 3, 2020
Advanced Energy Industries Assigned Patent for Spatial, Temporal Control of Ion Bias Voltage
Copyright © Targeted News Service, 2020
2020-07-08
ALEXANDRIA, Va., July 8 -- Advanced Energy Industries, Fort Collins, Colorado, has been assigned a patent (No. 10,707,055, initially filed Nov. 16, 2018) by three co-inventors for "spatial and temporal control of ion bias voltage for plasma processing." The co-inventors are Denis Shaw, Fort Collins, Colorado, Kevin Fairbairn, Los Gatos, California, and Daniel Carter, Fort Collins, Colorado.

The full-text of the patent can be found at http://patft.uspto.gov/netacgi/nph-Parser?Sect1=P . . .

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