Methods of Forming Group III Piezoelectric Thin Films via Removal of Portions of First Sputtered Material
Copyright © Targeted News Service 2026
2026-05-05
ALEXANDRIA, Virginia, May 5 -- AKOUSTIS TECHNOLOGIES CORP., Huntersville, North Carolina has been assigned a patent (No. US 12622174 B2, initially filed Jan. 19, 2024) developed by five inventors Craig Moe, Penfield, New York; Jeffrey B. Shealy, Cornelius, North Carolina; Mary Winters, Webster, New York; Dae Ho Kim, Cornelius, North Carolina; and Abhay Saranswarup Kochhar, Charlotte, North Carolina, for "Methods of forming group III piezoelectric thin films via removal of portions of first sput . . .
