Tuesday - September 9, 2025

Substrate Processing System and Method of Teaching Transfer Device

2025-08-19

ALEXANDRIA, Virginia, Aug. 19 -- TOKYO ELECTRON LIMITED, Tokyo, Japan has been assigned a patent (No. US 12394645 B2, initially filed Aug. 16, 2022) developed by Tomoyuki Oshima, Tokyo, Japan, and Takehiro Shindo, Yamanashi, Japan, for "Substrate processing system and method of teaching transfer device." . . .

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Substrate Processing System and Method of Teaching Transfer Device

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