Saturday - September 13, 2025

Information Processing Apparatus for Teaching Transfer Position of Substrate, Transfer Position Teaching Method, and Substrate Processing Apparatus Including the Information Processing Apparatus

2025-07-22

ALEXANDRIA, Virginia, July 22 -- TOKYO ELECTRON LIMITED, Tokyo, Japan has been assigned a patent (No. US 12367602 B2, initially filed May 25, 2022) developed by three inventors Tadashi Enomoto, Iwate, Japan; Nao Akashi, Hokkaido, Japan; and Yutai Matsuhashi, Iwate, Japan, for "Information processing apparatus for teaching transfer position of substrate, transfer position teaching method, and substrate processing apparatus including the information processing apparatus." . . .

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Information Processing Apparatus for Teaching Transfer Position of Substrate, Transfer Position Teaching Method, and Substrate Processing Apparatus Including the Information Processing Apparatus

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