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Journal of Vacuum Science & Technology B Issues Research Articles in September 2024 Edition
August 17, 2024
WASHINGTON, Aug. 17 -- The Journal of Vacuum Science and Technology B, a peer reviewed journal that says it covers microelectronics and nanotechnology, published research articles on the following topics in its September 2024 edition (Vol. 42, Issue 5):

ARTICLES

- Lithography

* Novel low-temperature and high-flux hydrogen plasma source for extreme-ultraviolet lithography applications

- MEMS and NEMS

* Fabrication of hollow silicon . . .

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