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Japanese Journal of Applied Physics Issues Research Articles in July 2023 Edition
July 18, 2023
TOKYO, Japan, July 18 -- The Japanese Journal of Applied Physics, a peer-reviewed journal from the Japan Society of Applied Physics, published research articles on the following topics in its July 2023 edition:

Progress Review:

* Progress report on high aspect ratio patterning for memory devices

Regular Papers:

* Luminescent iron disilicide film growth by metal-organic chemical vapor deposition

* Assessment of STI dry etch proces . . .

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