Journal of Vacuum Science & Technology B Issues Research Articles in January 2023 Edition
January 21, 2023
January 21, 2023
WASHINGTON, Jan. 21 -- The Journal of Vacuum Science and Technology B, a peer reviewed journal that says it covers microelectronics and nanotechnology, published research articles on the following topics in its January 2023 edition:
ARTICLES:
* Role of dose optimization in Ru atomic layer deposition for low resistivity films
* Large-area 1D selective emitter for thermophotovoltaic applications in the mid-infrared
* Evaluation of dry stored dis . . .
ARTICLES:
* Role of dose optimization in Ru atomic layer deposition for low resistivity films
* Large-area 1D selective emitter for thermophotovoltaic applications in the mid-infrared
* Evaluation of dry stored dis . . .