Journal of Vacuum Science & Technology A Issues Research Articles in January 2023 Edition
January 07, 2023
January 07, 2023
WASHINGTON, Jan. 7 -- The Journal of Vacuum Science and Technology A, a peer reviewed journal that says it covers interfaces and surfaces of materials, thin films and plasmas, published research articles on the following topics in its January 2023 edition:
ARTICLES:
* Molecular layer deposition of alucone in high aspect ratio trenches: The effect of TMA outgassing on step-coverage
* Selectivity dependence of atomic layer deposited manganese oxide on the pr . . .
ARTICLES:
* Molecular layer deposition of alucone in high aspect ratio trenches: The effect of TMA outgassing on step-coverage
* Selectivity dependence of atomic layer deposited manganese oxide on the pr . . .