WASHINGTON, Dec. 2 -- The Journal of Vacuum Science and Technology B, a peer reviewed journal that says it covers microelectronics and nanotechnology, published research articles on the following topics in its December 2022 edition:

ARTICLES:

* Dependence of electron emission current density on excitation power density from Cs/O-activated negative electron affinity InGaN photocathode

* Helium electron beam rf plasma for low-k surface functionalization