Journal of Vacuum Science & Technology B Issues Research Articles in January 2022 Edition
December 07, 2021
December 07, 2021
WASHINGTON, Dec. 7 -- The Journal of Vacuum Science and Technology B, a peer reviewed journal that says it covers microelectronics and nanotechnology, published research articles on the following topics in its January 2022 edition:
Electronic and Optoelectronic Materials, Devices and Processing:
* Thermochemical prediction of runaway energetic reactions involving organometallic (Al, In) and silane precursors in deposition tools
Lithography:
* . . .
Electronic and Optoelectronic Materials, Devices and Processing:
* Thermochemical prediction of runaway energetic reactions involving organometallic (Al, In) and silane precursors in deposition tools
Lithography:
* . . .