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Journal of Vacuum Science & Technology B Issues Research Articles in July 2021 Edition
July 24, 2021

WASHINGTON, July 24 -- The Journal of Vacuum Science and Technology B, a peer reviewed journal that says it covers microelectronics and nanotechnology, published research articles on the following topics in its July 2021 edition:

ARTICLES:

* Effect of thermodynamic parameters on properties of silicon-carbon films prepared by radio-frequency plasma-enhanced chemical vapor deposition for anti-reflective and photo-luminescent coatings

* Si-capping-induced sur . . .

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