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Journal of Vacuum Science & Technology A Issues Research Articles in May 2021 Edition
May 08, 2021
WASHINGTON, May 8 -- The Journal of Vacuum Science and Technology A, a peer reviewed journal that says it covers interfaces and surfaces of materials, thin films and plasmas, published research articles, including the following topics, in its May 2021 edition:

Review Articles:

* Thermal atomic layer etching: A review

* Heterovalent semiconductor structures and devices grown by molecular beam epitaxy

ARTICLES:

* Efficacy of boron . . .

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