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Journal of Vacuum Science & Technology B Issues Research Articles in March 2021 Edition
March 23, 2021
WASHINGTON, March 23 -- The Journal of Vacuum Science and Technology B, a peer reviewed journal that says it covers microelectronics and nanotechnology, published research articles on the following topics in its March 2021 edition:

ARTICLES:

* Particle-in-cell simulation of an industrial magnetron with electron population analysis

* Optimization of photoresist plating mold fabrication for metal mask patterning

* Systematic growth of carbon nan . . .

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