Training of Machine Learning-Based Inverse Lithography Technology for Mask Synthesis With Synthetic Pattern Generation
Copyright © Targeted News Service 2024
2024-12-17
ALEXANDRIA, Virginia, Dec. 17 -- SIEMENS INDUSTRY SOFTWARE INC., Plano, Texas has been assigned a patent (No. US 12169674 B2, initially filed Aug. 30, 2021) developed by Nataraj Akkiraju, Fremont, California, and Ilhami Torunoglu, San Jose, California, for "Training of machine learning-based inverse lithography technology for mask synthesis with synthetic pattern generation." . . .