Saturday - December 21, 2024

Fixture for Automatic Calibration of Substrate Transfer Robot

2024-12-17

ALEXANDRIA, Virginia, Dec. 17 -- LAM RESEARCH CORPORATION, Fremont, California has been assigned a patent (No. US 12168301 B2, initially filed Feb. 27, 2020) developed by five inventors Richard Blank, San Jose, California; Aravind Alwan, Milpitas, California; Behnam Behziz, Newark, California; Peter Thaulad, San Jose, California; and Mark E. Emerson, Newberg, Oregon, for "Fixture for automatic calibration of substrate transfer robot." . . .

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Fixture for Automatic Calibration of Substrate Transfer Robot

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