Sunday - December 22, 2024

Semiconductor Mask Reshaping Using a Sacrificial Layer

2024-12-10

ALEXANDRIA, Virginia, Dec. 10 -- LAM RESEARCH CORPORATION, Fremont, California has been assigned a patent (No. US 12165878 B2, initially filed Feb. 26, 2020) developed by four inventors Zhongkui Tan, Fremont, California; Xiaofeng Su, Portland, Oregon; Hua Xiang, Dublin, California; and Ce Qin, Fremont, California, for "Semiconductor mask reshaping using a sacrificial layer." . . .

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Semiconductor Mask Reshaping Using a Sacrificial Layer

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