Cover Ring to Mitigate Carbon Contamination in Plasma Doping Chamber
Copyright © Targeted News Service 2024
2024-12-10
ALEXANDRIA, Virginia, Dec. 10 -- APPLIED MATERIALS, INC., Santa Clara, California has been assigned a patent (No. US 12165852 B2, initially filed March 5, 2022) developed by five inventors Vikram M. Bhosle, North Reading, Massachusetts; Timothy J. Miller, Ipswich, Massachusetts; Eric D. Hermanson, Georgetown, Massachusetts; Christopher J. Leavitt, Gloucester, Massachusetts; and Jordan B. Tye, Arlington, Massachusetts, for "Cover ring to mitigate carbon contamination in plasma doping chamber." . . .