Sunday - December 22, 2024

Ex Situ Coating of Chamber Components for Semiconductor Processing

2024-12-10

ALEXANDRIA, Virginia, Dec. 10 -- LAM RESEARCH CORPORATION, Fremont, California has been assigned a patent (No. US 12163219 B2, initially filed Sept. 7, 2022) developed by seventeen inventors Damodar Rajaram Shanbhag, Beaverton, Oregon; Guangbi Yuan, Beaverton, Oregon; Thadeous Bamford, Portland, Oregon; Curtis Warren Bailey, West Linn, Oregon; Tony Kaushal, Campbell, California; Krishna Birru, Fremont, California; William Schlosser, Tigard, Oregon; Bo Gong, Sherwood, Oregon; Huatan Qiu, Portland . . .

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Ex Situ Coating of Chamber Components for Semiconductor Processing

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