Sunday - December 22, 2024

End-Of-Life Monitoring of Dynamic Gas Lock Membranes and Pupil Facet Mirrors and Detection of Membrane Rupture in Lithographic Apparatuses

2024-12-03

ALEXANDRIA, Virginia, Dec. 3 -- ASML HOLDING N.V. & ASML NETHERLANDS B.V., Veldhoven, Netherlands has been assigned a patent (No. US 12158705 B2, initially filed March 1, 2021) developed by five inventors Joseph Harry Lyons, Wilton, Connecticut; Jimi Hendriks, Eindhoven, Netherlands; Ping Zhou, Wilton, Connecticut; Zhuangxiong Huang, Eindhoven, Netherlands; and Reinier Theodorus Martinus Jilisen, Eindhoven, Netherlands, for "End-of-life monitoring of dynamic gas lock membranes and pupil facet m . . .

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End-Of-Life Monitoring of Dynamic Gas Lock Membranes and Pupil Facet Mirrors and Detection of Membrane Rupture in Lithographic Apparatuses

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