Monday - December 23, 2024

Nitride Etchant Composition and Method

2024-11-26

ALEXANDRIA, Virginia, Nov. 26 -- ENTEGRIS, INC., Billerica, Massachusetts has been assigned a patent (No. US 12152187 B2, initially filed Aug. 13, 2021) developed by six inventors Eric Hong, Bundang, South Korea; SeongJin Hong, Cheongju, South Korea; WonLae Kim, Gunpo, South Korea; JeongYeol Yang, Gunpo, South Korea; SeungHyun Chae, Gunpo, South Korea; and JuHee Yeo, Suwon, South Korea, for "Nitride etchant composition and method." . . .

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Nitride Etchant Composition and Method

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