Monday - December 23, 2024

MEMS Device Built on Substrate With Ruthenium Based Contact Surface Material

2024-11-19

ALEXANDRIA, Virginia, Nov. 19 -- MENLO MICROSYSTEMS, INC., Irvine, California has been assigned a patent (No. US 12148580 B2, initially filed Oct. 14, 2022) developed by three inventors Andrew Minnick, Queensbury, New York; Christopher F. Keimel, Niskayuna, New York; and Xu Zhu, Belmont, Massachusetts, for "MEMS device built on substrate with ruthenium based contact surface material." . . .

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MEMS Device Built on Substrate With Ruthenium Based Contact Surface Material

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