Monday - December 23, 2024

Optical Designs of Miniaturized Overlay Measurement System

2024-11-12

ALEXANDRIA, Virginia, Nov. 12 -- ASML HOLDING N.V., Veldhoven, Netherlands has been assigned a patent (No. US 12140872 B2, initially filed Jan. 21, 2021) developed by four inventors Mohamed Swillam, Wilton, Connecticut; Tamer Mohamed Tawfik Ahmed Mohamed Elazhary, New Canaan, Connecticut; Stephen Roux, New Fairfield, Connecticut; and Yevgeniy Konstantinovich Shmarev, Campbell, California, for "Optical designs of miniaturized overlay measurement system." . . .

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Optical Designs of Miniaturized Overlay Measurement System

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