Tuesday - December 24, 2024

Subtractive Metal Etch With Improved Isolation for BEOL Interconnect and Cross Point

2024-11-12

ALEXANDRIA, Virginia, Nov. 12 -- INTERNATIONAL BUSINESS MACHINES CORPORATION, Armonk, New York has been assigned a patent (No. US 12142562 B2, initially filed June 22, 2021) developed by three inventors Yann Mignot, Slingerlands, New York; Chanro Park, Clifton Park, New York; and Hsueh-Chung Chen, Cohoes, New York, for "Subtractive metal etch with improved isolation for BEOL interconnect and cross point." . . .

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Subtractive Metal Etch With Improved Isolation for BEOL Interconnect and Cross Point

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