Tuesday - December 24, 2024

Etching Method and Etching Apparatus

2024-11-12

ALEXANDRIA, Virginia, Nov. 12 -- TOKYO ELECTRON LIMITED, Tokyo, Japan has been assigned a patent (No. US 12142495 B2, initially filed Feb. 14, 2022) developed by three inventors Toshiki Kanaki, Albany, New York; Nobuhiro Takahashi, Nirasaki, Japan; and Megumi Umemoto, Nirasaki, Japan, for "Etching method and etching apparatus." . . .

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Etching Method and Etching Apparatus

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