Monday - December 23, 2024

Electrostatic Chuck With Seal Surface

2024-11-12

ALEXANDRIA, Virginia, Nov. 12 -- LAM RESEARCH CORPORATION, Fremont, California has been assigned a patent (No. US 12142509 B2, initially filed April 4, 2019) developed by six inventors Patrick G. Breiling, Portland, Oregon; Michael Philip Roberts, Tigard, Oregon; Chloe Baldasseroni, Tigard, Oregon; Ishtak Karim, Portland, Oregon; Adrien LaVoie, Newberg, Oregon; and Ramesh Chandrasekharan, Portland, Oregon, for "Electrostatic chuck with seal surface." . . .

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Electrostatic Chuck With Seal Surface

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