Thursday - December 26, 2024

Disturbance Compensation for Substrate Processing Recipes

2024-10-29

ALEXANDRIA, Virginia, Oct. 29 -- APPLIED MATERIALS, INC., Santa Clara, California has been assigned a patent (No. US 12130606 B2, initially filed Dec. 22, 2021) developed by four inventors Atilla Kilicarslan, Mountain View, California; Raechel Chu-Hui Tan, Oakland, California; Brooke Elise Montgomery, Morgan Hill, California; and Paul Z. Wirth, Kalispell, Montana, for "Disturbance compensation for substrate processing recipes." . . .

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Disturbance Compensation for Substrate Processing Recipes

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