Selective Processing With Etch Residue-Based Inhibitors
Copyright © Targeted News Service 2024
2024-10-29
ALEXANDRIA, Virginia, Oct. 29 -- LAM RESEARCH CORPORATION, Fremont, California has been assigned a patent (No. US 12131909 B2, initially filed Oct. 12, 2023) developed by four inventors Kashish Sharma, Tigard, Oregon; Taeseung Kim, Fremont, California; Samantha S. H. Tan, Newark, California; and Dennis M. Hausmann, Lake Oswego, Oregon, for "Selective processing with etch residue-based inhibitors." . . .