Wednesday - December 25, 2024

Chuck for Plasma Processing Chamber

2024-10-29

ALEXANDRIA, Virginia, Oct. 29 -- LAM RESEARCH CORPORATION, Fremont, California has been assigned a patent (No. US 12131890 B2, initially filed March 4, 2020) developed by Ann Erickson, Lake Oswego, Oregon, and Darrell Ehrlich, San Jose, California, for "Chuck for plasma processing chamber." . . .

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