Thursday - December 26, 2024

Plasma Processing System and Method Using Radio Frequency and Microwave Power

2024-10-29

ALEXANDRIA, Virginia, Oct. 29 -- TOKYO ELECTRON LIMITED, Tokyo, Japan has been assigned a patent (No. US 12131887 B2, initially filed May 4, 2021) developed by three inventors Yunho Kim, Cohes, New York; Yanxiang Shi, Clifton Park, New York; and Mingmei Wang, Albany, New York, for "Plasma processing system and method using radio frequency and microwave power." . . .

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Plasma Processing System and Method Using Radio Frequency and Microwave Power

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