Friday - December 27, 2024

Overlay Measurement System Using Lock-In Amplifier Technique

2024-10-22

ALEXANDRIA, Virginia, Oct. 22 -- ASML NETHERLANDS B.V., Veldhoven, Netherlands has been assigned a patent (No. US 12124177 B2, initially filed Nov. 18, 2020) developed by three inventors Mohamed Swillam, Wilton, Connecticut; Simon Reinald Huisman, Eindhoven, Netherlands; and Justin Lloyd Kreuzer, Trumbull, Connecticut, for "Overlay measurement system using lock-in amplifier technique." . . .

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Overlay Measurement System Using Lock-In Amplifier Technique

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