Substrate Processing Systems Including Gas Delivery System With Reduced Dead Legs
Copyright © Targeted News Service 2024
2024-04-16
ALEXANDRIA, Virginia, April 16 -- LAM RESEARCH CORPORATION, Fremont, California has been assigned a patent (No. US 11959172 B2, initially filed May 12, 2023) developed by six inventors Ramesh Chandrasekharan, Portland, Oregon; Antonio Xavier, Mulino, Oregon; Frank Loren Pasquale, Tigard, Oregon; Ryan Blaquiere, Portland, Oregon; Jennifer Leigh Petraglia, Portland, Oregon; and Meenakshi Mamunuru, Tigard, Oregon, for "Substrate processing systems including gas delivery system with reduced dead le . . .