Method and Apparatus for Impedance Matching in a Power Delivery System for Remote Plasma Generation
Copyright © Targeted News Service 2024
2024-04-09
ALEXANDRIA, Virginia, April 9 -- MKS INSTRUMENTS, INC., Andover, Massachusetts has been assigned a patent (No. US 11956885 B2, initially filed Aug. 19, 2021) developed by four inventors Ilya Pokidov, Winchester, Massachusetts; Mohammad Kamarehi, Lexington, Massachusetts; Kenneth B. Trenholm, Salem, New Hampshire; and Fedir Viktorovych Teplyuk, Lowell, Massachusetts, for "Method and apparatus for impedance matching in a power delivery system for remote plasma generation." . . .